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This International Standard specifies the guidelines of the method and procedure for determining the effect of temperature on atomic force microscope (AFM) nano-scale dimension measurements. The effect of temperature can be evaluated by continuously measuring the changes of the X- and Y- pitches and height of a two-dimensional (2D) calibration grating in an environmental temperature controllable AFM. If necessary, this method and procedure can be used to evaluate the effect of temperature on dimension measurement of other scanning probe microscopes(SPMs).
Atomic force microscopy (AFM) serves as a technique of great importance in nanoscience and nanotechnology. Tens of thousands of AFMs are now used across the globe in both academic and industrial institutions. Quantitative nanoscale dimension measurement by AFM is a more and more unique technique in IC industry. Although the influence of temperature on dimensional measurement is well known in traditional industry, the level of the effect and the method of evaluating temperature on AFM dimensional measurement is not very clear. The purpose of this international standard is to specify the method and procedure to determine these effects.
The previous study and the Round Robin Test conducted by VAMAS project of TWA/A21 showed that there were different levels of temperature effects on dimension measurements of various types of AFM in different countries. So this standard is useful to help the relevant AFM users to increase the accuracy of the dimension measurement.
Based on this interlaboratory test and some discussion, it was decided that ISO/TC201/SC9 requested Prof. Wenhao Huang to submit PWI 4726 "Guidelines for the method and procedure for determining the effect of temperature on AFM dimension measurement".
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