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Standards Development
This standard specifies the procedure for analyzing the same part of a material when measuring the same material with multiple different microscopic measuring instruments. This standard aims to show analysts the necessary procedures for analyzing the same part of a microscopic region of the same sample using a sample holder engraved with alignment markers as reference points shared by multiple microscopic measuring instruments. It applies to instruments capable of microscopic measurement with a spatial resolution ranging from sub-micron to approximately 10 m, and with a field of view of approximately 100 m or more. This standard does not apply to microscopic measuring instruments that cannot read the position coordinates of the sample movement stage and cannot specify the address of the analysis part based on the alignment marker. This standard applies to alignment on a two-dimensional plane, not to three-dimensional alignment.
Data-driven materials research utilizing artificial intelligence (AI) is being demanded to increase the throughput of novel material development. To accelerate the development of novel surfacefunctional materials, microscopic functional data obtained by the correlative combination of multiple surface chemical analysis instruments can be recommended. To implement such multimodal and multi-instrumental analyses, it is necessary to understand the measurement positions at the microscopic level, which requires establishing a reproducible procedure that can trace the identical locations on the same sample using a variety of surface analysis instruments. In analyses using various surface characterization instruments, it is generally rare for the surface structure of a target material to be homogeneous at the microscopic level. Therefore, a significant problem has arisen: the measurement points or areas to be characterized on the sample do not necessarily align among different analytical instruments unless precise alignment is performed. Thus, from both industry and academic perspectives, it is highly recommended that the standardization of accurate alignment procedures for sample analysis positions be promoted to ensure the integrity of measurement data. Besides, as one of the probable outcomes, it can be expected to accelerate the research and development of functional materials and ultra-fine devices for digital transformation.
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