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Standards Development
This document describes the standard procedures for the quantitative use of Kelvin probe force microscopy (KPFM). It includes reproducible measurements of contact potential differences (CPD), reliable deduction of the work function of the KPFM probe-tip in use, and quantitative evaluation of the lateral resolutions of CPD imaging with KPFM. This document is applicable to the quantitative analysis of KPFM surface potential imaging of solid material surfaces at the nanoscale.
Precise and quantitative measurement of surface electric potential at the nanoscale has been highly and increasingly demanded by researchers and engineers in the various fields of academia and industry. KPFM is the method for measuring quantitatively the surface/interface potential distribution at the nanoscale. Since the surface potential relates to many surface phenomena and functionalities, KPFM has diverse applications in various advanced industrial fields including integrated semiconductor devices, advanced photovoltaic cells, and all-solid-state lithium-ion batteries. Thus, it is obvious that there is an increasing industrial market need for the proposal. KPFM is a non-contact variant of atomic force microscopy (AFM) for the direct measurement of contact potential difference (CPD) between a KPFM probe tip and a sample surface with a nanometre resolution. If the potential of the probe-tip in use is given, it is possible to evaluate the surface potential of the sample quantitatively. Up to now, there is no international standard on how to determine the work function of the probe tip in use, measure the surface potential of a sample, and evaluate the lateral resolution of CPD imaging. The purpose of the proposal is to respond to the increasing demands from the nanotechnology industry for quantitative work function characterization of the probe apex in use, and for the practical procedures of quantitative surface potential imaging by KPFM. Besides, this document will bring the increased value of quantitative nanoscale potential measurement to KPFM end-users.
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