Standards Development
This part of new proposal describes terminology, definitions, test methods that can be used to evaluate and determine the main sensing performance of MEMS electric field sensitive devices. It also specifies sample requirements and test equipment for sensing performances of MEMS resonant electric field sensitive devices. The statements made in this document are a lso applicable to MEMS resonant electric field sensitive devices with various driving mechanisms such as electrostatic, electrothermal, electromagnetic, piezoelectric, etc. In addition, this proposal is also applicable to non resonant MEMS electric field sensitive devices.
The development of this IEC standard will fill the gap in the international standard system of MEMS electric field sensitive devices.It provides critical testing criteria for development and production of MEMS electric field sensitive devices, facilitating the establishment of standardized series. It is of great significance to promote the large-scale application of MEMS electric field sensing devices in more fields and seize the international high point of this product application. It has broad market prospects and huge social and economic benefits.
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