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PNW 47F-513 ED1: Micro-electromechanical systems-Part 58: Test methods for performances of MEMS thermopile devices

Scope

This part of IEC 62047 defines the test methods for the performance of MEMS thermopile devices.

The standard applies to the MEMS thermopile devices used in temperature measurement or imaging.

Purpose

MEMS thermopile devices convert thermal energy into electrical signals, featuring high integration and low power consumption. Widely used in temperature measurement, imaging, healthcare, and industrial automation, standardized testing methods are crucial for quality improvement and innovation promotion.

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