British Standards Institution

Source:: IEC
Committee:: EPL/47 - Semiconductors
Categories:: Information management | Standardization. General rules

Scope

This part of IEC 62047-56 specifies the requirements and test method for characteristics of MEMS metal oxide semiconductor (MOS) type gas sensor

Purpose

Microelectromechanical systems (MEMS) metal oxide semiconductor (MOS) type gas sensor is one of key components in MEMS technologies including Chemical MEMS and Bio-MEMS. MEMS MOS type gas sensor, in general, consists of MEMS structure with membrane for thermal isolation, micro heater for controlling operation temperature, insulator layer between micro heater and micro electrode, and micro electrode for measuring resistance change of gas sensing materials on micro electrode. It is possible to detect specific gas or measure the gas concentration by using highly sensitive and selective gas sensing materials. MEMS MOS type gas sensor are more cost-effective than conventional gas analysis tools and methods since expensive pre-concentrator, column, etc. and man-power are used less and in-situ monitoring is enabled.

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Please email further comments to: debbie.stead@bsigroup.com

Standard timeline

1. Proposal

Proposal start date:

14/11/2024

Proposal end date:

10/01/2025

2. Draft

3. Public Comments

4. Comment Resolution

5. Approval

6. Publication

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Standards Development

PNW 47F-488 ED1 Micro-electromechanical devices - Part 56: Test method for characteristics of MEMS metal oxide semiconductor (MOS) type gas sensor

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