British Standards Institution

Source:: IEC
Committee:: EPL/47 - Semiconductors
Categories:: Information management | Standardization. General rules

Scope

This part of IEC 62047 specifies a pendulum impact test method to evaluate the impact resistance of microstructures fabricated by micromachining technology used in silicon -based micro- electromechanical systems (MEMS). This document is applicable to the in -situ pendulum impact test of microstructures manufactured by microelectronic technology process and other micromachining technology.

Purpose

The application of this standard can cut process and chip development costs effectively, offer essential technical support for mass-producing MEMS chips, provide material property analysis methods for MEMS fabrication technology, and promote the industrialization and research of MEMS.

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Please email further comments to: debbie.stead@bsigroup.com

Standard timeline

1. Proposal

Proposal start date:

15/04/2024

Proposal end date:

26/05/2024

2. Draft

3. Public Comments

4. Comment Resolution

5. Approval

6. Publication

Learn more about the standards development process

Standards Development

PNW 47F-469 ED1: PNW 47F-469 ED1: Micro-electromechanical devices - Part 55: Silicon based MEMS fabrication technology - Test method of microstructure pendulum impact

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