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PNW 47F-461 ED1: Semiconductor devices - Micro-electromechanical devices - Part 53: MEMS electrothermal transfer device

Scope

This part of IEC 62047 describes test methods for performance of MEMS electrothermal transfer device. This standard applies to MEMS transfer device used in air bag, mineral and petroleum detection, igniter, detonator and so on,

Purpose

The standard aims to normalize test methods of Micro-electromechanical electrothermal transfer device performances. It will guide and normalize the design, produce, purchase and use. It will guarantee the quality for electrothermal transfer device, benefit producer, user, company and society.

The MEMS transfer device is small, good consistency, higher security, high reliability, high energy conversion rate, short response time, integration and strong anti -interference ability. So it is widely used for air bag, seismic detection, mineral and petroleum detection, igniter, detonator and so on. Because of no general specification, it is difficult to manufacture and use. The standard should be published and implemented. 

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