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Standards Development
This standard specifies evaluation standard of substrate conditions and testing of modulation period (including principle for low-angle X-ray methods, requirements of the coatings; requirements for X-Ray measuring apparatus; calibrating of apparatus and samples; testing conditions and calculation process) of nano-multilayer coatings by low-angle X-ray methods.
Common nano-multilayer coatings involve metal/metal, metal/ceramic and ceramic/ceramic systems such as Cu/Ni, Cu/W, Cu/Ag, Ti/TiN, Cr/CrN, Zr/ZN, TiN/CrN, CrN/AlCrN, TiC/TiCN, CrAlN/AlCrTiSiN et al.
“Modulation period evalution”in this standard means measurement conditions of X-ray methods and calculation of modulation period of the nano-multilayer hard coatings.
The purpose of this proposal is to start an international standardization process to prescribe the evaluation of modulation period of the nano-multilayer hard coatings by low-angle X-ray methods and the measurement conditions such as operating voltage, current, scanning step, scanning speed et al; this proposal is used in fields need coating (film) depositing such as microelectronics, tools, moulds et al; this proposal is also used for the researcher in the companies, universities, colleges and research institutes.
Based on the chemical compositions, the main PVD nano-multilayer coatings involve metal/metal, metal/ceramic and ceramic/ceramic systems such as Cu/Ni, Cu/W, Cu/Ag, Ti/TiN, Cr/CrN, Zr/ZN, TiN/CrN, CrN/AlCrN, TiC/TiCN, CrAlN/AlCrTiSiN et al. Key factor influencing the properties of nanomultilayer coatings is the modulation period, which has an important effect on the properties including hardness, toughness, electromagnetic and optical property. For example, as the modulation period of the Cr/CrN nano-multilayer coatings decreases, the hardness of the Nano-multilayer coatings increases. Thus, the modulation period could be an important technical indicator of the nano-multilayer coatings, which could provide the communication bridge both for the suppliers and the customers. At present, the high resolution projection electron microscope (HR-TEM) and the X-ray methods including the X-ray reflectivity (XRR) and glancing incident X-ray diffraction (GIXRD) are the two common methods to determine the modulation period of the nano-multilayer coatings. X-ray methods are more suitable for the determination of the modulation period due to the advantages such as nondestructive, statistical, convenient and accurate compared with HR-TEM.
However, there is no standard to qualify the modulation period of the multi-layer hard coatings of these nano-multilayer coatings by low-angle X-ray methods yet, which limits their further development. Thus, the motivation of this standard is to prescribe the measurement conditions of low- angle X-ray methods and calculation of modulation period of the nano-multilayer hard coatings. Therefore, the specification of modulation period of nano-multilayer coatings are strongly required from not only suppliers but also end users. A scientific measurement and measurement conditions should be provided to determine the modulation period of nano-multilayer coatings in this proposal in the future.
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