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BS EN IEC 63041-4 BS EN 63041-4 ED1 Piezoelectric Sensors. Part 4: Quartz Crystal Microbalance

Source:
IEC
Committee:
W/- - Miscellaneous Standards
Categories:
Piezoelectric devices
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Number of comments:
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Scope

This part of IEC 63041 specifies the requirements and guidelines for quartz crystal microbalances (QCMs) used for chemical, biochemical and physical sensing. It applies to QCM elements, cells, modules and systems, and covers the fundamental principles of measurement.

This document covers measurands such as mass, film thickness, particles and outgassing, which fall within the scope of application of IEC 63041-2 and IEC 63041-3.

NOTE See IEC 63041-1, 3.1.9.

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