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BS EN 62047-56 Ed.1.0 Micro-electromechanical devices. Part 56: Test method for characteristics of MEMS metal oxide semiconductor (MOS) type gas sensor

Source:
IEC
Committee:
EPL/47 - Semiconductors
Categories:
Semiconductor devices. General
Comment period start date:
Comment period end date:
Number of comments:
0

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This part of IEC 62047-56 specifies the requirements and test method for characteristics of MEMS metal oxide semiconductor (MOS) type gas sensor.

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Please email further comments to: debbie.stead@bsigroup.com

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