British Standards Institution

Source:: ISO
Committee:: STI/33 - Electrodeposited and related coatings
Categories:: Surface treatment and coating. General
Comment period start date:: 01/05/2025
Comment period end date:: 24/06/2025
Number of comments:: 5

Comment by:

24th Jun

Scope

This document defines the chemical characteristics and related process specifications of the atomic layer deposition precursors, including assay content, metal purity, and anion content specification.

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Please email further comments to: debbie.stead@bsigroup.com

Standard timeline

1. Proposal (Complete)

Proposal start date:

2. Draft (Complete)

Draft start date:

26/02/2025

3. Public Comments

Public Comments start date:

01/05/2025

Public Comments end date:

24/06/2025

Learn more about the standards development process

Standards Development

BS ISO 19383 Atomic layer deposition — Chemical characteristics and related process specifications of atomic layer deposition precursors

Scope

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