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BS ISO 23131-3 ISO 23131-3 Ellipsometry. Part 3: Transparent single layer model

Source:
ISO
Committee:
STI/33 - Electrodeposited and related coatings
Categories:
Metrology and measurement. General
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Scope

This document uses ellipsometric measurements and their analysis to specify the method for the determination of the layer thickness d of a transparent layer and the optical (refractive index n) or dielectric (real part ε1) constants/functions based on the transparent single layer model within a spectral region, for which k = 0 applies.

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