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BS ISO 11505 ISO 11505 Surface chemical analysis. General procedures for quantitative compositional depth profiling by glow discharge optical emission spectrometry

Source:
ISO
Committee:
CII/60 - Surface chemical analysis
Categories:
Chemical analysis
Comment period start date:
Comment period end date:
Number of comments:
0

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Scope

This document describes a glow discharge optical emission spectrometric (GD-OES) method for the determination of the thickness, mass per unit area and chemical composition of surface layer films.

It is limited to a description of general procedures of quantification of chemical composition and thickness in GD-OES compositional depth profiling and is not applicable directly for the quantification of individual materials having various thicknesses and elements to be determined.

NOTE Any individual standard for a test material will have to specify a scope of a thickness of the surface layer as well as analyte elements and include results of interlaboratory tests for validation of the methods.

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