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Find out what cookies we use and how to disable themThis document describes a glow discharge optical emission spectrometric (GD-OES) method for the determination of the thickness, mass per unit area and chemical composition of surface layer films.
It is limited to a description of general procedures of quantification of chemical composition and thickness in GD-OES compositional depth profiling and is not applicable directly for the quantification of individual materials having various thicknesses and elements to be determined.
NOTE Any individual standard for a test material will have to specify a scope of a thickness of the surface layer as well as analyte elements and include results of interlaboratory tests for validation of the methods.
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