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The document provides physical principles, description of instrumental requirements of TXRF spectrometers and general guidelines for calibration, method development and verification of TXRF measurements and quality control.
The document describes measurements at TXRF conditions, which are met in case of a fixed glancing angle below the critical angle of total reflection and considerably enhanced excitation radiation intensity. Although certain definitions of grazing incidence geometry are shown for clarification, this document excludes measurement setups working under such conditions.
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