British Standards Institution

Source:: IEC
Committee:: EPL/47 - Semiconductors
Categories:: Semiconductor devices. Other

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Please email further comments to: debbie.stead@bsigroup.com

Standard timeline

1. Proposal (Complete)

Proposal start date:

2. Draft (Complete)

Draft start date:

16/09/2022

3. Public Comments (Complete)

Public Comments start date:

20/04/2023

Public Comments end date:

26/07/2023

Learn more about the standards development process

Standards Development

BS IEC 62047-47:2024 Semiconductor devices. Micro-electromechanical devices. Silicon based MEMS fabrication technology. Measurement method of bending strength of microstructures

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