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ISO/NP 26897 Microbeam analysis — Scanning electron microscopy — Guidelines for calibrating pixel size on digital image of SEM and FIB-SEM

Source:
ISO
Committee:
CII/9 - Microbeam analysis
Categories:
Information management | Standardization. General rules
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Scope

This document specifies a method for calibrating the pixel size and FOV of digital images acquired using an SEM and an FIB-SEM, by employing an appropriate reference material. The applicable range of pixel size and FOV is limited by the structural dimensions available in the reference material used for calibration.

Purpose

The calibration of pixel size on digital image of SEM and FIB-SEM is not defined and relies on the method for each SEM and FIB-SEM vender. This new work item proposal provides the way how to calibrate the pixel size on digital image of SEM and FIB-SEM independently on the vendors.

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