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Standards Development
This document specifies the equipment, sample pretreatment, preparation conditions, and procedures of preparing sectional specimens by using focused ion beam (FIB) technique. This document applies to the preparation of sectional specimens of metal materials, including substrates, surface coatings, and corrosion layers. Other materials may refer to this document for guidance.
Focused Ion Beam (FIB) technology is a new micro-machining technique that integrates sample preparation, morphology observation, structure and composition analysis.FIB has a widespread application in sub-micron defect and surface coatings analysis. FIB can be used to prepare cross section specimen fro in-situ morphology observation by SEM,element analysis by EDS, phase or orientation analysis by EBSD. FIB can also be used to prepare cross section thin film specimen for TEM analysis.It is important to specify there preparation procedures in order to achieve proper results.
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