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Standards Development
This document specifies a platform-independent data file format for digital images generated by a scanning electron microscope (SEM) by adapting the TIFF based format.
Each SEM manufacturer stores SEM images and related instrument condition information in proprietary formats, creating a barrier to the sharing and archiving of SEM image information. This new work item describes a platform-independent file format, specifying what image information shall be included as tagged data, based on the TIFF 6.0 specification, in each SEM image file.
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