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BS ISO 21360-4 ISO 21360-4 Vacuum technology. Standard methods for measuring vacuum-pump performance. Part 4: Turbomolecular vacuum pumps

Source:
ISO
Committee:
MCE/8/-/4 - Vacuum technology
Categories:
Vacuum technology
Comment period start date:
Comment period end date:
Number of comments:
15

Comment by:

Scope

This document, in conjunction with ISO 21360-1, specifies methods for the measurement of performance characteristics of turbomolecular vacuum pumps. It is applicable to all sizes and all types of turbomolecular vacuum pumps, including those

—     with mechanical or magnetic bearings;

—     with or without an additional drag stage(s) or other pumping stages on the shaft;

—     with one or more inlet ports.

Since turbomolecular vacuum pumps are backed by primary pumps, their performance cannot be completely defined by the volume flow rate curve. Also, the driving device and the backing pressure of the turbomolecular vacuum pump is important to the performance.

The following completes the performance characteristics:

—     information about throughputs and backing pressure of the turbomolecular vacuum pump;

—     the compression ratio curve (compression ratio vs backing pressure of turbomolecular vacuum pump).

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