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This document specifies methods for chemical analysis of metal impurities present in silicon dioxide powders as fine ceramics using inductively coupled plasma-mass spectrometry (ICP-MS).
It stipulates methods for the determination of metal impurity elements in silicon dioxide powders that are decomposed by acid decomposition. The aluminium, cadmium, calcium, chromium, copper, iron, lead, lithium, magnesium, manganese, nickel, sodium, titanium, zinc and zirconium contents in the sample solution are determined by ICP-MS.
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