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Standards Development
This document specifies terms and procedures for the characterization of mass spectrometer leak detectors (MSLD). It is not intended to give a complete set of specifications for an acceptance test but a description of procedures that can be used without particular calibration equipment.
The methods described in this document are applicable without restrictions to helium as the tracer gas. For other gases, additional precautions may be necessary.
These methods are applicable to commonly available MSLD, based on the present level of technology, which may be able to measure leakage rates down to 10−12 Pa⋅m3/s.
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