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This document specifies guidelines on how to prepare reproducible and reliable lamella specimens using the FIB lift-out method to observe a micro area of interest in materials using TEM.
Materials usable for TEM specimen preparation by FIB processing are not only semiconductor materials such as Si but also metals and alloys, inorganic materials such as ceramics, as well as hard and soft biological materials, where the latter often require special sample preparation and modified FIB process.
Among several types of FIB systems such as plasma FIB and other types, this document is applicable to make TEM specimen of a site-specific lamella by the FIB equipment using Ga-LMIS source, either in a stand-alone FIB or in a FIB-SEM system. Since the basic guidelines in the ex situ lift-out method are the same as those in the in situ lift-out one, this document mainly describes that of the in situ lift-out method.
The basic concept of the present guidelines is as guidelines for automated TEM specimen preparation using FIB fabrication process.
It should be noted other preparation techniques for producing ultra-thin specimens for TEM using FIB are possible by a conventional method such as H-Bar shape, but beyond the scope of this document. For specific cases where the lamella lift-out preparation is unsuitable, readers are referred to the relevant scientific literature.
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