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BS EN ISO 25178-606 ISO 25178-606 Geometrical product specifications (GPS). Surface texture: Areal. Part 606: Design and characteristics of non-contact (focus variation) instruments

Source:
ISO
Committee:
TPR/1 - Technical Product Realization
Categories:
Measurement. Linear and angular | Measurement. Linear and angular. General |
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0

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Scope

This document specifies the design and characteristics of focus variation instruments for areal measurement of surface topography. Because surface profiles can be extracted from areal surface topography data the methods described in this document can be applied to profiling measurements as well.

This document deals with focus variation without pattern illumination or with fixed pattern illumination. The methods using varying pattern illumination during the measurement are excluded from this document.

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